The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. ex. Some numerals are expressed as "XNUMX".
Copyrights notice
The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. Copyrights notice
Rugate 박막 광학 필터는 다단계 또는 삼각형 스펙트럼과 같은 임의 모양의 스펙트럼을 설계하는 데 유용합니다. 스펙트럼에서 원치 않는 잔물결을 억제하기 위해 루게이트 필터의 굴절률 분포를 합성하는 기술이 사용되었습니다. 비정질 수소화산화규소(a-SiO)의 굴절률x:H) RF(Radio-Frequency) 마그네트론 스퍼터링을 이용하여 루게이트(rugate) 박막을 분해능 0.001로 미세하게 제어하였다. 제작된 루게이트 필터는 1260-1670 nm의 파장 범위에 걸쳐 다단계 밴드를 나타내거나 1290-1650 nm에 걸쳐 양호한 선형성을 나타냈습니다.
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Hidehiko YODA, Koichi MURO, Kazuo SHIRAISHI, "Fabrication of Rugate Optical Filters Using a-SiOx:H Thin Films" in IEICE TRANSACTIONS on Electronics,
vol. E91-C, no. 10, pp. 1639-1643, October 2008, doi: 10.1093/ietele/e91-c.10.1639.
Abstract: Rugate thin film optical filters are useful for designing arbitrary-shaped spectra, such as multistep or triangular spectra. A technique for synthesizing the refractive index distribution of rugate filters was used to suppress unwanted ripples on the spectrum. The refractive index of an amorphous hydrogenated silicon oxide (a-SiOx:H) rugate thin film was minutely controlled with a resolution of 0.001 using radio-frequency (RF) magnetron sputtering. The fabricated rugate filters had multistep bands over a wavelength range of 1260-1670 nm or good linearity over 1290-1650 nm.
URL: https://global.ieice.org/en_transactions/electronics/10.1093/ietele/e91-c.10.1639/_p
부
@ARTICLE{e91-c_10_1639,
author={Hidehiko YODA, Koichi MURO, Kazuo SHIRAISHI, },
journal={IEICE TRANSACTIONS on Electronics},
title={Fabrication of Rugate Optical Filters Using a-SiOx:H Thin Films},
year={2008},
volume={E91-C},
number={10},
pages={1639-1643},
abstract={Rugate thin film optical filters are useful for designing arbitrary-shaped spectra, such as multistep or triangular spectra. A technique for synthesizing the refractive index distribution of rugate filters was used to suppress unwanted ripples on the spectrum. The refractive index of an amorphous hydrogenated silicon oxide (a-SiOx:H) rugate thin film was minutely controlled with a resolution of 0.001 using radio-frequency (RF) magnetron sputtering. The fabricated rugate filters had multistep bands over a wavelength range of 1260-1670 nm or good linearity over 1290-1650 nm.},
keywords={},
doi={10.1093/ietele/e91-c.10.1639},
ISSN={1745-1353},
month={October},}
부
TY - JOUR
TI - Fabrication of Rugate Optical Filters Using a-SiOx:H Thin Films
T2 - IEICE TRANSACTIONS on Electronics
SP - 1639
EP - 1643
AU - Hidehiko YODA
AU - Koichi MURO
AU - Kazuo SHIRAISHI
PY - 2008
DO - 10.1093/ietele/e91-c.10.1639
JO - IEICE TRANSACTIONS on Electronics
SN - 1745-1353
VL - E91-C
IS - 10
JA - IEICE TRANSACTIONS on Electronics
Y1 - October 2008
AB - Rugate thin film optical filters are useful for designing arbitrary-shaped spectra, such as multistep or triangular spectra. A technique for synthesizing the refractive index distribution of rugate filters was used to suppress unwanted ripples on the spectrum. The refractive index of an amorphous hydrogenated silicon oxide (a-SiOx:H) rugate thin film was minutely controlled with a resolution of 0.001 using radio-frequency (RF) magnetron sputtering. The fabricated rugate filters had multistep bands over a wavelength range of 1260-1670 nm or good linearity over 1290-1650 nm.
ER -