The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. ex. Some numerals are expressed as "XNUMX".
Copyrights notice
The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. Copyrights notice
3차원 반도체 공정 시뮬레이터의 설계 개념과 배경을 제시한다. 반도체 공정 모델 개발의 기초가 되도록 설계되었습니다. 입력 언어는 시뮬레이션 시퀀스를 유연하게 제어할 수 있도록 설계되었으며, 해당 인터프리터 프로그램은 외부 소프트웨어를 제어하고 시스템에 통합할 수 있도록 설계되었습니다. 프로세스 시뮬레이터와 다른 소프트웨어 간의 데이터 교환을 실현하기 위해 자체 설명적 데이터 파일 형식이 설계되고 관련 프로그램 라이브러리가 개발되었습니다. XNUMX차원 공간에서 표류-확산형 편미분 방정식을 풀기 위한 C++ 클래스가 개발되었습니다.
반도체, 프로세스 시뮬레이터, 디자인, 파일 형식
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부
Tetsunori WADA, Norihiko KOTANI, "Design and Development of 3-Dimensional Process Simulator" in IEICE TRANSACTIONS on Electronics,
vol. E82-C, no. 6, pp. 839-847, June 1999, doi: .
Abstract: Design concepts and backgrounds of a 3-dimensional semiconductor process simulator are presented. It is designed to become a basis of developing semiconductor process models. An input language is designed to realize flexibly controlling simulation sequence, and its interpreter program is designed to accept external software to be controlled and to be integrated into a system. To realize data-exchanges between the process simulator and other software, a self-describing data-file format is designed and related program libraries are developed. A C++ class for solving drift-diffusion type partial-differential-equation in a three-dimensional space is developed.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e82-c_6_839/_p
부
@ARTICLE{e82-c_6_839,
author={Tetsunori WADA, Norihiko KOTANI, },
journal={IEICE TRANSACTIONS on Electronics},
title={Design and Development of 3-Dimensional Process Simulator},
year={1999},
volume={E82-C},
number={6},
pages={839-847},
abstract={Design concepts and backgrounds of a 3-dimensional semiconductor process simulator are presented. It is designed to become a basis of developing semiconductor process models. An input language is designed to realize flexibly controlling simulation sequence, and its interpreter program is designed to accept external software to be controlled and to be integrated into a system. To realize data-exchanges between the process simulator and other software, a self-describing data-file format is designed and related program libraries are developed. A C++ class for solving drift-diffusion type partial-differential-equation in a three-dimensional space is developed.},
keywords={},
doi={},
ISSN={},
month={June},}
부
TY - JOUR
TI - Design and Development of 3-Dimensional Process Simulator
T2 - IEICE TRANSACTIONS on Electronics
SP - 839
EP - 847
AU - Tetsunori WADA
AU - Norihiko KOTANI
PY - 1999
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E82-C
IS - 6
JA - IEICE TRANSACTIONS on Electronics
Y1 - June 1999
AB - Design concepts and backgrounds of a 3-dimensional semiconductor process simulator are presented. It is designed to become a basis of developing semiconductor process models. An input language is designed to realize flexibly controlling simulation sequence, and its interpreter program is designed to accept external software to be controlled and to be integrated into a system. To realize data-exchanges between the process simulator and other software, a self-describing data-file format is designed and related program libraries are developed. A C++ class for solving drift-diffusion type partial-differential-equation in a three-dimensional space is developed.
ER -