The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. ex. Some numerals are expressed as "XNUMX".
Copyrights notice
The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. Copyrights notice
향상된 시스템 통합을 허용하기 위해 PRISM 기술을 위해 복잡한 모듈식 프로세스 흐름이 개발되었습니다. 서브미크론 CMOS 로직, 비휘발성 메모리, 정밀 선형 및 전력 드라이버 등 필수 기능을 모놀리식 실리콘 칩에 결합하기 위해 프로세스 합성에 대한 고도로 구조화되고 체계적인 접근 방식이 개발되었습니다. TCAD 도구는 프로세스 설계 및 검증에 광범위하게 사용되었습니다. 60V LDMOS 파워 트랜지스터와 이 기술이 내장된 플래시 메모리 셀에 대해 설명하여 프로세스 합성 방법론을 설명합니다.
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Michael SMAYLING, John RODRIGUEZ, Alister YOUNG, Ichiro FUJII, "Process Synthesis Using TCAD: A Mixed-Signal Case Study" in IEICE TRANSACTIONS on Electronics,
vol. E82-C, no. 6, pp. 983-991, June 1999, doi: .
Abstract: A complex modular process flow was developed for PRISM technology to permit increased system integration. In order to combine the required functions--submicron CMOS Logic, Nonvolatile Memories, Precision Linear, and Power Drivers--on a monolithic silicon chip, a highly structured, systematic approach to process synthesis was developed. TCAD tools were used extensively for process design and verification. The 60 V LDMOS power transistor and the Flash memory cell built in the technology will be described to illustrate the process synthesis methodology.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e82-c_6_983/_p
부
@ARTICLE{e82-c_6_983,
author={Michael SMAYLING, John RODRIGUEZ, Alister YOUNG, Ichiro FUJII, },
journal={IEICE TRANSACTIONS on Electronics},
title={Process Synthesis Using TCAD: A Mixed-Signal Case Study},
year={1999},
volume={E82-C},
number={6},
pages={983-991},
abstract={A complex modular process flow was developed for PRISM technology to permit increased system integration. In order to combine the required functions--submicron CMOS Logic, Nonvolatile Memories, Precision Linear, and Power Drivers--on a monolithic silicon chip, a highly structured, systematic approach to process synthesis was developed. TCAD tools were used extensively for process design and verification. The 60 V LDMOS power transistor and the Flash memory cell built in the technology will be described to illustrate the process synthesis methodology.},
keywords={},
doi={},
ISSN={},
month={June},}
부
TY - JOUR
TI - Process Synthesis Using TCAD: A Mixed-Signal Case Study
T2 - IEICE TRANSACTIONS on Electronics
SP - 983
EP - 991
AU - Michael SMAYLING
AU - John RODRIGUEZ
AU - Alister YOUNG
AU - Ichiro FUJII
PY - 1999
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E82-C
IS - 6
JA - IEICE TRANSACTIONS on Electronics
Y1 - June 1999
AB - A complex modular process flow was developed for PRISM technology to permit increased system integration. In order to combine the required functions--submicron CMOS Logic, Nonvolatile Memories, Precision Linear, and Power Drivers--on a monolithic silicon chip, a highly structured, systematic approach to process synthesis was developed. TCAD tools were used extensively for process design and verification. The 60 V LDMOS power transistor and the Flash memory cell built in the technology will be described to illustrate the process synthesis methodology.
ER -