The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. ex. Some numerals are expressed as "XNUMX".
Copyrights notice
The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. Copyrights notice
최근 MEMS(Micro Electro Mechanical Systems)의 응용은 많은 분야에서 눈부신 발전을 이루었습니다. MEMS의 광학 응용은 광통신 네트워크 및 데이터 저장 장치의 고성능 시스템을 위한 핵심 구성 요소인 마이크로 기계 광학 장치를 제공하기 때문에 가장 유망한 분야 중 하나입니다. 이 문서에서는 MEMS 기술이 광학 시스템에 미치는 영향을 설명합니다. 또한 마이크로 광 스위치, 피그 테일 조정 가능 필터 및 XNUMX차원 MEMS 광 스캐너의 최첨단 예가 설명되어 있습니다.
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Hiroyuki FUJITA, Hiroshi TOSHIYOSHI, "Optical MEMS" in IEICE TRANSACTIONS on Electronics,
vol. E83-C, no. 9, pp. 1427-1434, September 2000, doi: .
Abstract: Recently the applications of MEMS (micro electro mechanical systems) have made remarkable progress in many filelds. The optical application of MEMS is one of the most promising because it provides micro mechano optical devices, the key components for high-perfromance systems in optical communication networks and data storage devices. This paper disucces the impacts of MEMS techologies on optical systems. Furthermore, state-of-the-art exmaples of micro optical switches, pig-tailed tunable filters and two-dimensional MEMS optical scanners are described.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e83-c_9_1427/_p
부
@ARTICLE{e83-c_9_1427,
author={Hiroyuki FUJITA, Hiroshi TOSHIYOSHI, },
journal={IEICE TRANSACTIONS on Electronics},
title={Optical MEMS},
year={2000},
volume={E83-C},
number={9},
pages={1427-1434},
abstract={Recently the applications of MEMS (micro electro mechanical systems) have made remarkable progress in many filelds. The optical application of MEMS is one of the most promising because it provides micro mechano optical devices, the key components for high-perfromance systems in optical communication networks and data storage devices. This paper disucces the impacts of MEMS techologies on optical systems. Furthermore, state-of-the-art exmaples of micro optical switches, pig-tailed tunable filters and two-dimensional MEMS optical scanners are described.},
keywords={},
doi={},
ISSN={},
month={September},}
부
TY - JOUR
TI - Optical MEMS
T2 - IEICE TRANSACTIONS on Electronics
SP - 1427
EP - 1434
AU - Hiroyuki FUJITA
AU - Hiroshi TOSHIYOSHI
PY - 2000
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E83-C
IS - 9
JA - IEICE TRANSACTIONS on Electronics
Y1 - September 2000
AB - Recently the applications of MEMS (micro electro mechanical systems) have made remarkable progress in many filelds. The optical application of MEMS is one of the most promising because it provides micro mechano optical devices, the key components for high-perfromance systems in optical communication networks and data storage devices. This paper disucces the impacts of MEMS techologies on optical systems. Furthermore, state-of-the-art exmaples of micro optical switches, pig-tailed tunable filters and two-dimensional MEMS optical scanners are described.
ER -