The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. ex. Some numerals are expressed as "XNUMX".
Copyrights notice
The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. Copyrights notice
SBT 필름의 표면 형태와 압전 반응은 주사 탐침 현미경을 통해 동시에 측정되었습니다. 단락된 커패시터 패드가 많은 샘플에서는 SBT 필름 표면에서 몇 가지 이상한 구조가 관찰되었습니다. 압전 이미지는 부분적으로 AFM 이미지와 일치하지 않았습니다. 일부 특정 입자는 압전 결함으로 밝혀졌습니다. 또한 평평한 표면을 가진 일부 작은 입자가 관찰되었으며 이는 우수한 강유전성을 나타냈습니다. 다음으로 표면 형태와 누설 전류를 동시에 측정했습니다. 누출 지점이 발견될 때까지 의도적으로 높은 전압에서의 스캐닝을 반복했습니다. 우리는 결정립 경계나 평평한 작은 결정립이 아닌 일부 큰 결정립에 있는 누출 지점을 발견했습니다. 정제되지 않은 소스에서 파생된 또 다른 SBT 필름에서는 표면에 이상한 구조가 없음에도 불구하고 많은 강유전성 결함이 관찰되었습니다. 순도는 이러한 결함을 방지하는 능력과 중요한 관계가 있습니다. 따라서 이러한 나노현미경 연구는 문제의 원인이 되는 메커니즘에 대한 이해를 크게 촉진하고 장치 제조 공정 조건의 최적화를 가능하게 합니다.
AFM, 피에조 이미지, 누설 전류 이미지, SrBi2Ta2O9, 졸겔법
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Mami SAITO, Kumi OKUWADA, Soichi NADAHARA, "Nanoscale Investigation of Piezo and Leakage Defects in SBT Film by SPM" in IEICE TRANSACTIONS on Electronics,
vol. E84-C, no. 6, pp. 802-807, June 2001, doi: .
Abstract: Surface morphology and piezo response on SBT films were simultaneously measured by scanning probe microscopy. In a sample that had many short-circuited capacitor pads, some curious structures were observed on the SBT film surface. The piezo image partially did not correspond with the AFM image. Some specific grains were revealed to be piezo defects. Also observed were some smaller grains with flat surface, which showed good ferroelectricity. Next, we carried out simultaneous measurements of surface morphology and leakage current. The scanning at an intentionally high voltage was repeated until the leakage points were found. We found the leakage points, which were on some large grains, not at grain boundaries or on the flat smaller grains. In another SBT film derived from an unrefined source, many ferroelectric defects were observed despite there being no curious structures on the surface. Purity has an important bearing on the ability to avoid these defects. Thus, these nanoscopic investigations would greatly facilitate understanding of the mechanisms responsible for problems and enable optimization of the process conditions in device fabrication.
URL: https://global.ieice.org/en_transactions/electronics/10.1587/e84-c_6_802/_p
부
@ARTICLE{e84-c_6_802,
author={Mami SAITO, Kumi OKUWADA, Soichi NADAHARA, },
journal={IEICE TRANSACTIONS on Electronics},
title={Nanoscale Investigation of Piezo and Leakage Defects in SBT Film by SPM},
year={2001},
volume={E84-C},
number={6},
pages={802-807},
abstract={Surface morphology and piezo response on SBT films were simultaneously measured by scanning probe microscopy. In a sample that had many short-circuited capacitor pads, some curious structures were observed on the SBT film surface. The piezo image partially did not correspond with the AFM image. Some specific grains were revealed to be piezo defects. Also observed were some smaller grains with flat surface, which showed good ferroelectricity. Next, we carried out simultaneous measurements of surface morphology and leakage current. The scanning at an intentionally high voltage was repeated until the leakage points were found. We found the leakage points, which were on some large grains, not at grain boundaries or on the flat smaller grains. In another SBT film derived from an unrefined source, many ferroelectric defects were observed despite there being no curious structures on the surface. Purity has an important bearing on the ability to avoid these defects. Thus, these nanoscopic investigations would greatly facilitate understanding of the mechanisms responsible for problems and enable optimization of the process conditions in device fabrication.},
keywords={},
doi={},
ISSN={},
month={June},}
부
TY - JOUR
TI - Nanoscale Investigation of Piezo and Leakage Defects in SBT Film by SPM
T2 - IEICE TRANSACTIONS on Electronics
SP - 802
EP - 807
AU - Mami SAITO
AU - Kumi OKUWADA
AU - Soichi NADAHARA
PY - 2001
DO -
JO - IEICE TRANSACTIONS on Electronics
SN -
VL - E84-C
IS - 6
JA - IEICE TRANSACTIONS on Electronics
Y1 - June 2001
AB - Surface morphology and piezo response on SBT films were simultaneously measured by scanning probe microscopy. In a sample that had many short-circuited capacitor pads, some curious structures were observed on the SBT film surface. The piezo image partially did not correspond with the AFM image. Some specific grains were revealed to be piezo defects. Also observed were some smaller grains with flat surface, which showed good ferroelectricity. Next, we carried out simultaneous measurements of surface morphology and leakage current. The scanning at an intentionally high voltage was repeated until the leakage points were found. We found the leakage points, which were on some large grains, not at grain boundaries or on the flat smaller grains. In another SBT film derived from an unrefined source, many ferroelectric defects were observed despite there being no curious structures on the surface. Purity has an important bearing on the ability to avoid these defects. Thus, these nanoscopic investigations would greatly facilitate understanding of the mechanisms responsible for problems and enable optimization of the process conditions in device fabrication.
ER -