The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. ex. Some numerals are expressed as "XNUMX".
Copyrights notice
The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. Copyrights notice
우리는 샘플링 간격을 기존 알고리즘에서 사용되는 것 중 가장 넓은 간격의 두 배로 확장하는 백색광 간섭계에 의한 표면 프로파일링 알고리즘을 제안합니다. 제안된 알고리즘은 다음과 같은 새로운 함수를 사용합니다. 동위상 성분 기존 알고리즘은 제곱 봉투 함수 또는 봉투 함수를 사용했지만 간섭 무늬의 피크를 감지하기 위해 간섭 무늬를 사용했습니다. 우리는 광학 필터가 대칭적인 스펙트럼 분포를 가질 때 동위상 성분이 해당 간섭무늬와 동일한 피크를 가짐을 보여줍니다. 우리는 또한 소위 직교 샘플링 기술을 사용하여 간섭계의 샘플링된 값으로부터 동위상 구성요소를 재구성할 수 있음을 보여줍니다. 알고리즘에 사용된 재구성 공식은 매우 간단하므로 제안하는 알고리즘은 계산 비용이 저렴하다. 시뮬레이션 결과는 제안된 알고리즘의 효율성을 보여준다.
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부
Akira HIRABAYASHI, "Fast Surface Profiling by White-Light Interferometry Using Symmetric Spectral Optical Filter" in IEICE TRANSACTIONS on Fundamentals,
vol. E93-A, no. 2, pp. 542-549, February 2010, doi: 10.1587/transfun.E93.A.542.
Abstract: We propose a surface profiling algorithm by white-light interferometry that extends sampling interval to twice of the widest interval among those used in conventional algorithms. The proposed algorithm uses a novel function called an in-phase component of an interferogram to detect the peak of the interferogram, while conventional algorithms used the squared-envelope function or the envelope function. We show that the in-phase component has the same peak as the corresponding interferogram when an optical filter has a symmetric spectral distribution. We further show that the in-phase component can be reconstructed from sampled values of the interferogram using the so-called quadrature sampling technique. Since reconstruction formulas used in the algorithm are very simple, the proposed algorithm requires low computational costs. Simulation results show the effectiveness of the proposed algorithm.
URL: https://global.ieice.org/en_transactions/fundamentals/10.1587/transfun.E93.A.542/_p
부
@ARTICLE{e93-a_2_542,
author={Akira HIRABAYASHI, },
journal={IEICE TRANSACTIONS on Fundamentals},
title={Fast Surface Profiling by White-Light Interferometry Using Symmetric Spectral Optical Filter},
year={2010},
volume={E93-A},
number={2},
pages={542-549},
abstract={We propose a surface profiling algorithm by white-light interferometry that extends sampling interval to twice of the widest interval among those used in conventional algorithms. The proposed algorithm uses a novel function called an in-phase component of an interferogram to detect the peak of the interferogram, while conventional algorithms used the squared-envelope function or the envelope function. We show that the in-phase component has the same peak as the corresponding interferogram when an optical filter has a symmetric spectral distribution. We further show that the in-phase component can be reconstructed from sampled values of the interferogram using the so-called quadrature sampling technique. Since reconstruction formulas used in the algorithm are very simple, the proposed algorithm requires low computational costs. Simulation results show the effectiveness of the proposed algorithm.},
keywords={},
doi={10.1587/transfun.E93.A.542},
ISSN={1745-1337},
month={February},}
부
TY - JOUR
TI - Fast Surface Profiling by White-Light Interferometry Using Symmetric Spectral Optical Filter
T2 - IEICE TRANSACTIONS on Fundamentals
SP - 542
EP - 549
AU - Akira HIRABAYASHI
PY - 2010
DO - 10.1587/transfun.E93.A.542
JO - IEICE TRANSACTIONS on Fundamentals
SN - 1745-1337
VL - E93-A
IS - 2
JA - IEICE TRANSACTIONS on Fundamentals
Y1 - February 2010
AB - We propose a surface profiling algorithm by white-light interferometry that extends sampling interval to twice of the widest interval among those used in conventional algorithms. The proposed algorithm uses a novel function called an in-phase component of an interferogram to detect the peak of the interferogram, while conventional algorithms used the squared-envelope function or the envelope function. We show that the in-phase component has the same peak as the corresponding interferogram when an optical filter has a symmetric spectral distribution. We further show that the in-phase component can be reconstructed from sampled values of the interferogram using the so-called quadrature sampling technique. Since reconstruction formulas used in the algorithm are very simple, the proposed algorithm requires low computational costs. Simulation results show the effectiveness of the proposed algorithm.
ER -