The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. ex. Some numerals are expressed as "XNUMX".
Copyrights notice
The original paper is in English. Non-English content has been machine-translated and may contain typographical errors or mistranslations. Copyrights notice
본 논문에서는 CTPN(Colored Timed Petri-Nets)을 사용하여 반도체 제조 백엔드 프로세스의 운영 및 제어를 개선하기 위한 효과적인 시스템 모델링 및 동적 스케줄링 방법을 개발했습니다. CTPNs 모델의 시뮬레이터를 활용하여 가중 지연 시간과 리드 타임의 표준 편차의 최적 값을 얻을 수 있는 유전자 알고리즘(GA)을 사용하여 새로운 경험적 스케줄링 방법을 생성했습니다.
The copyright of the original papers published on this site belongs to IEICE. Unauthorized use of the original or translated papers is prohibited. See IEICE Provisions on Copyright for details.
부
Sin Jun KANG, Seok Ho JANG, Hee Soo HWANG, Kwang Bang WOO, "Colored Timed Petri-Nets Modeling and Job Scheduling Using GA of Semiconductor Manufacturing" in IEICE TRANSACTIONS on Information,
vol. E82-D, no. 11, pp. 1483-1485, November 1999, doi: .
Abstract: In this paper, an effective method of system modeling and dynamic scheduling to improve operation and control for the Back-End process of semiconductor manufacturing is developed by using Colored Timed Petri-Nets (CTPNs). The simulator of a CTPNs model was utilized to generate a new heuristic scheduling method with genetic algorithm(GA) which enables us to obtain the optimal values of the weighted delay time and standard deviation of lead time.
URL: https://global.ieice.org/en_transactions/information/10.1587/e82-d_11_1483/_p
부
@ARTICLE{e82-d_11_1483,
author={Sin Jun KANG, Seok Ho JANG, Hee Soo HWANG, Kwang Bang WOO, },
journal={IEICE TRANSACTIONS on Information},
title={Colored Timed Petri-Nets Modeling and Job Scheduling Using GA of Semiconductor Manufacturing},
year={1999},
volume={E82-D},
number={11},
pages={1483-1485},
abstract={In this paper, an effective method of system modeling and dynamic scheduling to improve operation and control for the Back-End process of semiconductor manufacturing is developed by using Colored Timed Petri-Nets (CTPNs). The simulator of a CTPNs model was utilized to generate a new heuristic scheduling method with genetic algorithm(GA) which enables us to obtain the optimal values of the weighted delay time and standard deviation of lead time.},
keywords={},
doi={},
ISSN={},
month={November},}
부
TY - JOUR
TI - Colored Timed Petri-Nets Modeling and Job Scheduling Using GA of Semiconductor Manufacturing
T2 - IEICE TRANSACTIONS on Information
SP - 1483
EP - 1485
AU - Sin Jun KANG
AU - Seok Ho JANG
AU - Hee Soo HWANG
AU - Kwang Bang WOO
PY - 1999
DO -
JO - IEICE TRANSACTIONS on Information
SN -
VL - E82-D
IS - 11
JA - IEICE TRANSACTIONS on Information
Y1 - November 1999
AB - In this paper, an effective method of system modeling and dynamic scheduling to improve operation and control for the Back-End process of semiconductor manufacturing is developed by using Colored Timed Petri-Nets (CTPNs). The simulator of a CTPNs model was utilized to generate a new heuristic scheduling method with genetic algorithm(GA) which enables us to obtain the optimal values of the weighted delay time and standard deviation of lead time.
ER -